mentor SF3

MENTOR SF3

Measurement Enclosure

Roll Over for Features

Single Load Port: Brooks Fixload 6M with Mapper
Single 300mm FOUP
Fully Automatic
300mm Semi-Standard Compliant Automation and User interface software
Brooks Robot
Mini-Environment
200mm Compatible with FOUP Adaptor
CE, S2 & S8 Compliant
Throughput: Up to 60 wafers per hour

Width

890mm

Power

Single Phase

Length

1153mm

Vacuum

End Effector/Load Port

Height

1490mm

Compressed Air

Load Port

Footprint

1.05m2

Network Connection

Host