Metryx Product Range

High Precision Mass Metrology Tools

MASS CHANGE: A DIRECT MEASUREMENT OF PROCESS PERFORMANCE

The Metryx mentor range is an in-line process monitoring solution which rapidly identifies production wafer trends and excursions. Monitoring the mass change for any process step is an effective in-line check, revealing the true wafer mean; while flagging bad wafers.

Key Features of Metryx Mass Metrology tools

  • On-Product Measurement

  • Non-invasive

  • Atomic level accuracy

  • Applicable to all process modules - deposition, etch and CMP, on metals and dielectrics

  • High throughput in-line solution

  • Self-contained corroboration of metrology result

  • No monitor wafers or test sites required

  • Low CoO

  • User friendly software with recipe editing and configurable user security

The measurement encompasses etch depth & profile, material composition, deposition step coverage or gap-fill result. Metryx enables increased metrology coverage on product wafers without compromising throughput, allowing complex, analytical metrology tools to be effectively applied where required on failed wafers.