OPERATION
Fully automatic cassette-cassette operation using industry standard 200 and 300mm open cassettes to allow measurements of the wafers before and after processing.
Sophisticated control of ambient conditions is fully automatic and provides weighing capability to the required level of <0.04mg needed to detect density changes in the range of 0.01g/cm3. The system is controlled via an SGVA Touch screen with simple to use software that can be fully integrated to the fab communications network e.g.SECS11/GEM.
