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MENTOR OC23
|mentor SF3|
|mentor DF3| |
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Roll Over for Features |
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- SECS/GEM
- Brooks Robot
- 150mm to 300mm wafer handling
- Throughput: Up to 60 wafers per hour
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Width |
570mm |
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| Length |
1017mm |
Power |
Single Phase |
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| Height |
1118mm |
Vacuum |
End Effector |
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| Footprint |
0.58m2
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Network Connection |
Host |
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