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Metryx mentor OC23
Metryx mentor OC23
Innovative Metrology intended for 150/200mm wafer production environment
Key Features
- Fully Automatic
- Fully SECS/GEM compliant
- Brooks Robot with safety light curtain
- 150mm to 200mm wafer handling from open cassette
- Throughput: Up to 60 wafers per hour
- Resolution 10µg (displayed)
- Repeatability: <0.24mg (3 sigma)
- CE compliant
A new generation of metrology based on innovative mass measurement