NEWS AND EVENTS

Visit Metryx at SEMICON Japan, with Canon Marketing Japan Booth 6C-1001

Metryx Receives Two IC Industry Awards from EuroAsia Semiconductor
View PDF

Metryx and Hermes-Epitek Sign Mass Metrology Sales and Service Agreement for Taiwan, China and Singapore
View PDF

Metryx Receives 2008 Queen's Award for Innovation

Metryx to Host One-Day Mass Metrology Seminar at IMEC
View PDF

1-Day Seminar: Mass Metrology in Advanced Semiconductor Processing

Metryx Receives Multiple System Follow-On Order from Inotera

Metryx and IMEC Enter Joint Development Program for Sub-32nm Metrology

Mentor DF3

A SIMPLE, EFFECTIVE APPROACH

Metryx was formed with a view of bringing a significant change to semiconductor measurement technology. The significant change is now installed and providing SPC to leading edge 300mm volume production processes. This innovative metrology utilises the simplest of measurement parameters and the very basics of physics – everything has a mass and undergoes mass change during process.

Characterizing a wafer’s mass with atomic precision can non-destructively and non-intrusively highlight process problems quicker than any other form of metrology. It does this on actual PRODUCT WAFERS and there is no need for test wafers or using up valuable wafer area by test structures. In essence, understanding a wafer’s mass and how it changes as the wafer goes through a manufacturing process can save an exceptional amount of time and wasted wafer runs - all at a fraction of the cost of existing metrology solutions.

In 2002, the company started to sell its unique mass metrology technology to semiconductor manufacturers. Today that technology is in volume production all over the world. It is helping Fabs to ramp production wafers quicker than at any other time before and is also helping Fabs running at capacity to make sure their process is running optimally.

Metryx Mass Metrology...on PRODUCT WAFER measurement, LOW CoO, HIGH RoI and ATOMIC LEVEL repeatability...