MENTOR DF3

|mentor SF3|

|mentor OC23|

Roll Over for Features

 
  • Fully Automatic
  • Dual Brooks Fixload 6M Load Ports with Mapper
  • Dual 300mm FOUPs
  • 300mm Semi-Standard Compliant Automation & User Interface Software
  • Brooks Robot enclosed in Mini Environment
  • 200mm and 300mm Wafer Handling
  • Throughput: Up to 60 wafers per hour
  • CE, S2 & S8 Compliant

Width

 1125mm Power Single Phase    
Length 1750mm Vacuum End Effector/Load Ports    
Height 1900mm Compressed Air Load Port    
Footprint 2.00m2 Network Connection Host